Mapping nitrogen heteroatoms in carbon fibres using atom probe tomography and photoelectron spectroscopy

X-ray photoelectron spectroscopy of graphitic carbon nanomaterials doped with heteroatoms

X-ray photoelectron spectroscopy (XPS) is one of the best tools for studying the chemical modification of surfaces, and in particular the distribution and bonding of heteroatom dopants in carbon nanomaterials such as graphene and carbon nanotubes. Although these materials have superb intrinsic properties, these often need to be modified in a controlled way for specific applications. Towards thi...

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

Advanced Nanostructural Analysis of Aluminium Alloys Using Atom Probe Tomography

This paper sets out the needs for and recent advances in microscopy in Al alloys, using solutesolute and solute-vacancy clustering as examples. Cluster-assisted nucleation and cluster strengthening are discussed and this is followed by a discussion of the local electrode atom probe. Heuristic and algorithmic tools for assessing the nanoscale microstructure or nanostructure of Al alloys acquired...

Toward atom probe tomography of microelectronic devices

Atom Probe Tomography of Oxide Scales

Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1-0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented. It is followed by e...